Research Description:

Thermoelectric microdevices for power generation

Thermoelectricity is a term for the interaction that exists between temperature differentials and electric potentials. Certain materials exhibit thermoelectric properties such that a temperature gradient across the material will lead to potential for flow of electricity through it, or, conversely, a flow of electricity through the material will create a temperature difference across it. These materials have already been employed in bulky modules that may be found in compact refrigerators and specialized computer cooling systems. The goal of this project is to investigate a means for fabrication of a microscale thermoelectric power generator by way of a process flow that is compatible with microelectromechanical systems (MEMS). Prior to building the microscale generator, a mathematical model will be formulated to predict the effects of thermoelectric phenomena in materials. This model will be verified by comparison against experimental results obtained from traditional, commercially available thermoelectric modules. Designs for a microscale generator can then be optimized by analysis of the model. The device will be fabricated through a series of depositions and etches of materials on the surface of a silicon wafer. Performance of the device will then be tested experimentally and compared to the predicted performance values. Successful fabrication of the thermoelectric power generator may allow for integration of the generator with other MEMS devices to create new self-powered modules.